NADAtech S Series - 200mm Wafer Sorters (s25, s34, s35)
NADAtech’s SMIF wafer sorters for 150mm and 200mm provide industry standard SMIF ports for Sub Class 1 environment particle performance. All models include industry standard robotic components for the longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Key features include:
- 2 to 4 station configurations available
- 325wph OCR / 800wph transfer
- Industry standard OEM robotics
- Automation capable with SECSII / GEM / HSMS
- Vacuum backside or edge handling
- IOSS OCR
- UPS power backup + vacuum reservoir
NADAtech’s SMIF wafer sorters for 150mm and 200mm provide industry standard SMIF ports for Sub Class 1 environment particle performance. All models include industry standard robotic components for the longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Key features include:
- 2 to 4 station configurations available
- 325wph OCR / 800wph transfer
- Industry standard OEM robotics
- Automation capable with SECSII / GEM / HSMS
- Vacuum backside or edge handling
- IOSS OCR
- UPS power backup + vacuum reservoir
NADAtech’s SMIF wafer sorters for 150mm and 200mm provide industry standard SMIF ports for Sub Class 1 environment particle performance. All models include industry standard robotic components for the longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Key features include:
- 2 to 4 station configurations available
- 325wph OCR / 800wph transfer
- Industry standard OEM robotics
- Automation capable with SECSII / GEM / HSMS
- Vacuum backside or edge handling
- IOSS OCR
- UPS power backup + vacuum reservoir