NADAtech Bow Warp Measurement System/Add-On Module
The Bow Warp add-on module continues NADAtech’s trend of increased capabilities from a sorting platform. Utilizing an award-winning optical tomography sensor, their new module can measure total thickness variation, average thickness and bow/warp in scans that take seconds, not minutes. Add Bow Warp / Thickness to NADAtech’s ever growing list of bolt on Sorter+ options that give customers the competitive advantage they need. Key features include:
- Non-contact bow / warp / thickness
- 3 seconds for standard 49pt scan
- Scanning sensor - no wafer movement
- +/- 25μm XY sensor positioning
- Up to 70kHz data acquisition
- +/- 1μm with 0.36% Gage RnR repeatability
- GUI software for developing any type of scan shape required
- Measurements can be added to ANY wafer sort
- Sorter+ option for 150 / 200 / 300mm tools
- 2 / 3 / 4 port inline tool versions
- Available with other sorter+ options
The Bow Warp add-on module continues NADAtech’s trend of increased capabilities from a sorting platform. Utilizing an award-winning optical tomography sensor, their new module can measure total thickness variation, average thickness and bow/warp in scans that take seconds, not minutes. Add Bow Warp / Thickness to NADAtech’s ever growing list of bolt on Sorter+ options that give customers the competitive advantage they need. Key features include:
- Non-contact bow / warp / thickness
- 3 seconds for standard 49pt scan
- Scanning sensor - no wafer movement
- +/- 25μm XY sensor positioning
- Up to 70kHz data acquisition
- +/- 1μm with 0.36% Gage RnR repeatability
- GUI software for developing any type of scan shape required
- Measurements can be added to ANY wafer sort
- Sorter+ option for 150 / 200 / 300mm tools
- 2 / 3 / 4 port inline tool versions
- Available with other sorter+ options
The Bow Warp add-on module continues NADAtech’s trend of increased capabilities from a sorting platform. Utilizing an award-winning optical tomography sensor, their new module can measure total thickness variation, average thickness and bow/warp in scans that take seconds, not minutes. Add Bow Warp / Thickness to NADAtech’s ever growing list of bolt on Sorter+ options that give customers the competitive advantage they need. Key features include:
- Non-contact bow / warp / thickness
- 3 seconds for standard 49pt scan
- Scanning sensor - no wafer movement
- +/- 25μm XY sensor positioning
- Up to 70kHz data acquisition
- +/- 1μm with 0.36% Gage RnR repeatability
- GUI software for developing any type of scan shape required
- Measurements can be added to ANY wafer sort
- Sorter+ option for 150 / 200 / 300mm tools
- 2 / 3 / 4 port inline tool versions
- Available with other sorter+ options
This equipment is advertised on behalf of NADA Technologies, LLC (NADAtech)